Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems

Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became widely used large-volume products today. However, due to reliability-related issues inherent limitations, the pull-in instability extremely small stroke force, commercial are limited basic implementations micro range, thus cannot be employed more intricate systems or scaled up macro range (mm N force). To overcome these cooperative actuator have been researched by many groups recent years. After defining scope three different levels of cooperation, this review provides an overview examples weak, medium advanced architectures. As a specific class, hybrid architectures presented, which besides actuation, another actuation principle is used. Inchworm motors—belonging architectures—can provide, principle, link range. result outstanding potential, they reviewed analyzed here detail. despite promising research concepts results, applications still missing. The acceptance piezoelectric materials industrial CMOS facilities might now open gate towards microactuators realized high volumes technology.